Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.841692
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dc.titleFabrication of porous silicon channel waveguides with multilayer Bragg cladding
dc.contributor.authorBettiol, A.A.
dc.contributor.authorTeo, E.J.
dc.contributor.authorPrashant, S.
dc.contributor.authorBoqian, X.
dc.contributor.authorBreese, M.B.H.
dc.date.accessioned2014-10-16T09:50:31Z
dc.date.available2014-10-16T09:50:31Z
dc.date.issued2010
dc.identifier.citationBettiol, A.A., Teo, E.J., Prashant, S., Boqian, X., Breese, M.B.H. (2010). Fabrication of porous silicon channel waveguides with multilayer Bragg cladding. Proceedings of SPIE - The International Society for Optical Engineering 7606 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.841692
dc.identifier.isbn9780819480026
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98710
dc.description.abstractThe ability to control the porosity and hence the refractive index of porous silicon makes it an interesting material for photonic applications. Layers with refractive indices as low as 1.5 up to that of bulk crystalline silicon can be easily fabricated by varying the electrochemical etching parameters during anodization. This ability to control the refractive index makes it possible to design waveguides that more closely match the properties of silica based optical fiber, thus reducing insertion loss. In this paper we explore the possibility of using a focused laser in order to create waveguiding regions in porous silicon substrates comprising of multiple layers. The direct write process can be used to locally oxidize the porous material forming micron sized channels that can be used for waveguiding. Various designs are simulated using a finite element mode solver in order to optimize the design parameters for single mode waveguiding. Experimental results showing the effect of laser irradiation on multilayered structures are also presented. © 2010 Copyright SPIE - The International Society for Optical Engineering.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.841692
dc.sourceScopus
dc.subjectElectrochemical etching
dc.subjectLaser writing
dc.subjectPorous silicon
dc.subjectWaveguides
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.description.doi10.1117/12.841692
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume7606
dc.description.page-
dc.description.codenPSISD
dc.identifier.isiut000285576100017
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