Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.mee.2012.02.017
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dc.titleFabrication of optical microresonators using proton beam writing
dc.contributor.authorKumar, V.S.
dc.contributor.authorTuraga, S.P.
dc.contributor.authorTeo, E.J.
dc.contributor.authorBettiol, A.A.
dc.date.accessioned2014-10-16T09:50:27Z
dc.date.available2014-10-16T09:50:27Z
dc.date.issued2013-02
dc.identifier.citationKumar, V.S., Turaga, S.P., Teo, E.J., Bettiol, A.A. (2013-02). Fabrication of optical microresonators using proton beam writing. Microelectronic Engineering 102 : 33-35. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2012.02.017
dc.identifier.issn01679317
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98708
dc.description.abstractProton beam writing is a high-resolution direct write lithographic technique capable of producing three dimensional, high aspect ratio structures with smooth and vertical sidewalls. In this work, the fabrication of high quality SU-8 optical microdisk resonator with a Q factor of 10 4 is demonstrated. Simulations carried out using finite difference time domain (FDTD) are in good agreement with experimental results. By introducing rhodamine B laser dye into a SU-8 resist spiral microdisk cavity lasing was achieved with threshold pump fluence of 127 μJ/mm 2 when pumped with a 532 nm pulsed Nd:YAG laser. © 2011 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.mee.2012.02.017
dc.sourceScopus
dc.subjectFDTD simulations
dc.subjectLaser cavity
dc.subjectOptical microresonator
dc.subjectProton beam writing
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/j.mee.2012.02.017
dc.description.sourcetitleMicroelectronic Engineering
dc.description.volume102
dc.description.page33-35
dc.description.codenMIENE
dc.identifier.isiut000312232300010
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