Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.524300
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dc.titleFabrication of micro-optical components in polymer using proton beam writing
dc.contributor.authorBettiol, A.A.
dc.contributor.authorAnsari, K.
dc.contributor.authorSum, T.C.
dc.contributor.authorVan Kan, J.A.
dc.contributor.authorWatt, F.
dc.date.accessioned2014-10-16T09:50:25Z
dc.date.available2014-10-16T09:50:25Z
dc.date.issued2004
dc.identifier.citationBettiol, A.A., Ansari, K., Sum, T.C., Van Kan, J.A., Watt, F. (2004). Fabrication of micro-optical components in polymer using proton beam writing. Proceedings of SPIE - The International Society for Optical Engineering 5347 : 255-263. ScholarBank@NUS Repository. https://doi.org/10.1117/12.524300
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98706
dc.description.abstractProton beam writing is a new direct write lithographic technique that utilizes a high energy (MeV) submicron focused proton beam to machine or modify a material, usually a polymer. Structures made using p-beam writing have very smooth side walls, high aspect ratio, and a scale that can be easily matched to existing optical fiber technology (0.1 to 1000 μm). In this paper we demonstrate the use of proton beam writing for prototyping micro-optical components such as microlens arrays and gratings in positive and negative resist. The structures that are fabricated can be used for both rapid prototyping and for large scale replication with nanoimprint lithography.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.524300
dc.sourceScopus
dc.subjectGratings
dc.subjectMicrolens array
dc.subjectPMMA
dc.subjectPolymer
dc.subjectProton beam writing
dc.subjectSU-8
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.description.doi10.1117/12.524300
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume5347
dc.description.page255-263
dc.description.codenPSISD
dc.identifier.isiut000189447300029
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