Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.apsusc.2011.10.014
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dc.titleFabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
dc.contributor.authorMalar, P.
dc.contributor.authorZhao, J.
dc.contributor.authorVan Kan, J.A.
dc.date.accessioned2014-10-16T09:50:24Z
dc.date.available2014-10-16T09:50:24Z
dc.date.issued2012-02-15
dc.identifier.citationMalar, P., Zhao, J., Van Kan, J.A. (2012-02-15). Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography. Applied Surface Science 258 (9) : 4191-4194. ScholarBank@NUS Repository. https://doi.org/10.1016/j.apsusc.2011.10.014
dc.identifier.issn01694332
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98704
dc.description.abstractIn this paper, we present the results of resist evaluation for the fabrication of metallic stamps used in the injection moulding of micro/nano fluidic devices. The resist was evaluated in terms of its suitability to combine direct proton beam writing (PBW) and UV lithography techniques for incorporating few tens of micron and micron- to millimeter sized features respectively. In a first step PBW is used to generate the fine features with smooth sidewall profiles in AR-P 3250, here the resist shows negative behavior. Following PBW, masked i-line UV lithography was used to create larger features to complete the device design, here the AR-P 3250 acts as a positive resist. After developing, the resist was used to generate the final mould through Ni electroplating, resulting in a high quality metallic stamp. © 2011 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.apsusc.2011.10.014
dc.sourceScopus
dc.subjectNi mould fabrication
dc.subjectProton beam writing
dc.subjectUV lithography
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/j.apsusc.2011.10.014
dc.description.sourcetitleApplied Surface Science
dc.description.volume258
dc.description.issue9
dc.description.page4191-4194
dc.description.codenASUSE
dc.identifier.isiut000300455200018
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