Vacuum pump coaxial probe system for measurement of dielectric properties of materials with smooth surfaces

Abstract

A technique for measuring dielectric properties of materials using a coaxial probe is presented. It aims to overcome the error due to air gap between the probe and the sample. By pumping out air between the probe and the sample, a more accurate measurement result can be obtained. The technique is experimentally verified by measuring the dielectric properties of cz-Si crystals and is shown to be accurate, convenient, non-destructive and non-contaminating.