Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.tsf.2004.05.009
DC Field | Value | |
---|---|---|
dc.title | The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films | |
dc.contributor.author | Li, Q. | |
dc.contributor.author | Wang, S.J. | |
dc.contributor.author | Lim, P.C. | |
dc.contributor.author | Chai, J.W. | |
dc.contributor.author | Huan, A.C.H. | |
dc.contributor.author | Ong, C.K. | |
dc.date.accessioned | 2014-10-16T09:44:47Z | |
dc.date.available | 2014-10-16T09:44:47Z | |
dc.date.issued | 2004-09 | |
dc.identifier.citation | Li, Q., Wang, S.J., Lim, P.C., Chai, J.W., Huan, A.C.H., Ong, C.K. (2004-09). The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films. Thin Solid Films 462-463 (SPEC. ISS.) : 106-109. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.009 | |
dc.identifier.issn | 00406090 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/98251 | |
dc.description.abstract | The dynamic process of the reactions during deposition of M(Hf or Zr)O 2 thin films on SiO2-covered silicon substrate in oxygen deficient conditions has been investigated. A series of reactions across the interface were identified with thermodynamic arguments and with X-ray Photoelectron Spectroscopy (XPS) and transmission electron microscopy (TEM) analyses. The oxygen deficient MOx | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.tsf.2004.05.009 | |
dc.source | Scopus | |
dc.subject | Deposition | |
dc.subject | SiO2 | |
dc.subject | XPS | |
dc.type | Article | |
dc.contributor.department | PHYSICS | |
dc.description.doi | 10.1016/j.tsf.2004.05.009 | |
dc.description.sourcetitle | Thin Solid Films | |
dc.description.volume | 462-463 | |
dc.description.issue | SPEC. ISS. | |
dc.description.page | 106-109 | |
dc.description.coden | THSFA | |
dc.identifier.isiut | 000223812800023 | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.