The CIBA high resolution RBS facility

Abstract

Recently, a high resolution RBS facility was installed at the Centre for Ion Beam Applications (CIBA) at the National University of Singapore (NUS). The magnetic spectrometer comprises of a 90° double focusing sector magnet and a 2D-MCP focal plane detector. The UHV scattering chamber is equipped with a five axis goniometer for channeling applications, the setup is similar to that used by the Kyoto group [K. Kimura, M. Kimura, Y. Mori, M. Maehara, H. Fukuyama, AIP Conf. Proc. 475 (1999) 500]. State of the art performance characteristics were expected, because the system operates in conjunction with the NUS Singletron accelerator, which provides ion beams with very favorable phase space characteristics. Well resolved spectra of 10 nm SiO2/Si are shown, and an energy resolution of 0.9 keV FWHM was measured at the leading Si edge of a SiO2 sample at 300 keV and 80° scattering angle, which is close to the value expected from kinematic broadening alone in this case (∼0.7 keV). © 2006 Elsevier B.V. All rights reserved.