Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0925-9635(00)00331-9
DC FieldValue
dc.titleStructural modification of polymeric amorphous hydrogenated carbon films induced by high energetic He+ irradiation and thermal annealing
dc.contributor.authorZhang, Q.
dc.contributor.authorYoon, S.F.
dc.contributor.authorAhn, J.
dc.contributor.authorRusli, X.
dc.contributor.authorYang, H.
dc.contributor.authorGan, B.
dc.contributor.authorYang, C.
dc.contributor.authorWatt, F.
dc.contributor.authorTeo, E.J.
dc.contributor.authorOsipowice, T.
dc.date.accessioned2014-10-16T09:42:30Z
dc.date.available2014-10-16T09:42:30Z
dc.date.issued2000-09
dc.identifier.citationZhang, Q., Yoon, S.F., Ahn, J., Rusli, X., Yang, H., Gan, B., Yang, C., Watt, F., Teo, E.J., Osipowice, T. (2000-09). Structural modification of polymeric amorphous hydrogenated carbon films induced by high energetic He+ irradiation and thermal annealing. Diamond and Related Materials 9 (9) : 1758-1761. ScholarBank@NUS Repository. https://doi.org/10.1016/S0925-9635(00)00331-9
dc.identifier.issn09259635
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/98058
dc.description.abstractStructural modifications of polymeric amorphous hydrogenated carbon (a-C:H) films by 2 MeV He+ irradiation and by thermal annealing up to 400°C have been made. After irradiation with a dose of 1.2 × 1015 cm-12, the film hardness was increased by a factor of 3. Correspondingly, the optical band gap shrank from 3.0 to 2.5 eV and the refractive index was increased from 1.5 to 1.6. In contrast, although the optical band gap was found to be decreased to a similar small value of 2.0 eV after the films were thermally annealed in a vacuum of 10-6 torr at 400°C for 30 min, the variations in the refractive index and film hardness were not detectable. The structural modifications of the carbon network in the a-C:H films by the ion irradiation and thermal anneal are discussed.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/S0925-9635(00)00331-9
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/S0925-9635(00)00331-9
dc.description.sourcetitleDiamond and Related Materials
dc.description.volume9
dc.description.issue9
dc.description.page1758-1761
dc.description.codenDRMTE
dc.identifier.isiut000089203100041
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

6
checked on Jul 2, 2020

WEB OF SCIENCETM
Citations

6
checked on Jul 2, 2020

Page view(s)

68
checked on Jun 27, 2020

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.