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Title: Quantitative analysis of a-Si1 - XCx:H thin films
Authors: Gracin, D.
Jakšić, M.
Yang, C. 
Borjanović, V.
Praček, B.
Keywords: Amorphous films
Auger spectroscopy
Carbon content
FTIR spectroscopy
Hydrogen content
Issue Date: Apr-1999
Citation: Gracin, D.,Jakšić, M.,Yang, C.,Borjanović, V.,Praček, B. (1999-04). Quantitative analysis of a-Si1 - XCx:H thin films. Applied Surface Science 144-145 (0) : 188-191. ScholarBank@NUS Repository.
Abstract: The composition of a-Si1 - xCx:H films, deposited by magnetron sputtering, was measured by AES (Auger Electron Spectroscopy), RBS (Rutherford Backscattering Spectrometry) using both, protons and α-particles, ERDA (Elastic Recoil Detection Analysis) and FTIR spectroscopy. The results obtained by all three methods show agreement in CC/CSi ratio within the experimental error. However, the AES somewhat underestimates the silicon concentrations, which is discussed as a consequence of chemical bonding and matrix effects. The hydrogen concentrations obtained by ERDA are typically about 30% higher than those estimated by FTIR, possibly due to the presence of non-bonded hydrogen in the film. © 1999 Elsevier Science B.V. All rights reserved.
Source Title: Applied Surface Science
ISSN: 01694332
Appears in Collections:Staff Publications

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