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Title: Proton beam micromachining: A new tool for precision three-dimensional microstructures
Authors: Van Kan, J.A. 
Bettiol, A.A. 
Wee, B.S.
Sum, T.C. 
Tang, S.M. 
Watt, F. 
Keywords: High aspect ratio
Nuclear microscope
Proton beam
Issue Date: 1-Aug-2001
Citation: Van Kan, J.A., Bettiol, A.A., Wee, B.S., Sum, T.C., Tang, S.M., Watt, F. (2001-08-01). Proton beam micromachining: A new tool for precision three-dimensional microstructures. Sensors and Actuators, A: Physical 92 (1-3) : 370-374. ScholarBank@NUS Repository.
Abstract: Proton beam micromachining (PBM) is a novel technique for the production of high aspect-ratio three-dimensional (3D) microcomponents. PBM is a direct write process in which a focused beam of MeV protons is scanned in a pre-determined pattern over a suitable resist material (e.g. PMMA or SU-8) and the latent image formed is subsequently chemically developed. One strategy for full exploitation of the advantages offered by PBM is the conversion of the microstructures produced in the resist to metallic components by electrolytic plating. The metallic structures may then be used in a bulk production process, e.g. microstamping or micromolding. In this paper we describe the introduction of a beam blanking system to improve the quality of microstructures, and present data showing that electrolytic Ni plating of proton beam micromachined resist structures result in well defined and smooth metallic microstructures.
Source Title: Sensors and Actuators, A: Physical
ISSN: 09244247
DOI: 10.1016/S0924-4247(01)00574-X
Appears in Collections:Staff Publications

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