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Title: Photoelectron emission and Raman scattering studies of nitrogenated tetrahedral amorphous carbon films
Authors: Shi, J.R.
Wang, J.P.
Wee, A.T.S. 
Yeo, C.B.
Cheng, C.T.
Ueda, M.
Tomioka, S.
Ohsako, J.
Issue Date: 15-Nov-2002
Citation: Shi, J.R., Wang, J.P., Wee, A.T.S., Yeo, C.B., Cheng, C.T., Ueda, M., Tomioka, S., Ohsako, J. (2002-11-15). Photoelectron emission and Raman scattering studies of nitrogenated tetrahedral amorphous carbon films. Journal of Applied Physics 92 (10) : 5966-5970. ScholarBank@NUS Repository.
Abstract: Nitrogenated tetrahedral amorphous carbon (N:ta-C) films prepared by the filtered cathodic vacuum arc technique were studied by x-ray photoelectron spectroscopy (XPS), Raman spectroscopy, spectroscopic ellipsometry, ultraviolet photoelectron spectroscopy and temperature dependent resistance measurement. As the nitrogen flow rate varies from 0 to 20 sccm, the nitrogen content in the deposited film increases from 0 to 4.6 at.%. Curve fitting of the C 1s and N 1s XPS spectra shows that the C-C sp 3 fraction decreases with an increase in nitrogen content and that the nitrogen atoms are mainly bonded in sp 2 C-N bonds. The pure ta-C film has a work function of 4.35 eV and the N:ta-C films have a value around 4.55 eV. With an increase in nitrogen flow rate, the intensity ratio of the D peak to the G peak, I D/I G increases monotonously from 0.44 to 1.25 and the G peak width decreases from 220 to 199 cm -1. The Tauc optical band gap decreases from 2.2 to 1.8 eV. © 2002 American Institute of Physics. © 2002 American Institute of Physics.
Source Title: Journal of Applied Physics
ISSN: 00218979
DOI: 10.1063/1.1512963
Appears in Collections:Staff Publications

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