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Title: Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation
Authors: Teo, E.J. 
Bettiol, A.A. 
Yang, P.
Breese, M.B.H. 
Xiong, B.Q.
Mashanovich, G.Z.
Headley, W.R.
Reed, G.T.
Issue Date: 1-Mar-2009
Citation: Teo, E.J., Bettiol, A.A., Yang, P., Breese, M.B.H., Xiong, B.Q., Mashanovich, G.Z., Headley, W.R., Reed, G.T. (2009-03-01). Fabrication of low-loss silicon-on-oxidized-porous-silicon strip waveguide using focused proton-beam irradiation. Optics Letters 34 (5) : 659-661. ScholarBank@NUS Repository.
Abstract: We have successfully fabricated low-loss silicon-on-oxidized-porous-silicon (SOPS) strip waveguides with high-index contrast using focused proton-beam irradiation and electrochemical etching. Smooth surface quality with rms roughness of 3.1 nm is achieved for a fluence of 1× 1015/ cm2 after postoxidation treatment. Optical characterization at a wavelength of 1550 nm shows a loss of 1.1±0.4 dB/cm and 1.2±0.4 dB/cm in TE and TM polarization respectively, which we believe is the lowest reported loss for SOPS waveguides. This opens up new opportunities for all-silicon-based optoelectronics applications. © 2009 Optical Society of America.
Source Title: Optics Letters
ISSN: 01469592
DOI: 10.1364/OL.34.000659
Appears in Collections:Staff Publications

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