Please use this identifier to cite or link to this item:
|Title:||Fabrication of concave silicon micro-mirrors||Authors:||Ow, Y.S.
|Issue Date:||5-Jul-2010||Citation:||Ow, Y.S.,Breese, M.B.H.,Azimi, S. (2010-07-05). Fabrication of concave silicon micro-mirrors. Optics Express 18 (14) : 14511-14518. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.18.14511||Abstract:||We have fabricated spherical and cylindrical concave micromirrors in silicon with dimensions from 20 μm to 100 μm. The fabrication process involves standard photolithography followed by large area ion beam irradiation and electrochemical anodisation in a HF electrolyte. After thermal oxidation the silicon surface roughness is less than 2 nm. We also present a multilayer porous silicon distributed Bragg reflector fabricated on concave silicon surfaces which selectively reflect and focus a band of wavelengths from a parallel beam of incident white light. Development of such low roughness concave microstructures opens up new applications in areas such as silicon photonics and quantum information science. © 2010 Optical Society of America.||Source Title:||Optics Express||URI:||http://scholarbank.nus.edu.sg/handle/10635/96591||ISSN:||10944087||DOI:||10.1364/OE.18.14511|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on May 22, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.