Please use this identifier to cite or link to this item:
|Title:||Enhancement of proton beam writing in PMMA through optimization of the development procedure||Authors:||Bolhuis, S.
van Kan, J.A.
Proton beam writing
|Issue Date:||15-Jun-2009||Citation:||Bolhuis, S., van Kan, J.A., Watt, F. (2009-06-15). Enhancement of proton beam writing in PMMA through optimization of the development procedure. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (12-13) : 2302-2305. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.045||Abstract:||The development step of the proton beam writing (PBW) process plays an important role in the performance characteristics that can be achieved with a resist-developer system. A common developer for PBW in PMMA resist is the mixture IPA/water, used in combination with conventional dip development. In this paper, we investigate the use of the GG-developer, much used in the LIGA-process, and show that the GG-developer is able to dip develop proton beam written structures of feature sizes down to 133 nm in a PMMA layer of 2.4 μm thickness. Moreover, both contrast and sensitivity are found to be higher for the GG-developer compared to dip development in 7:3 IPA/water. The development method as well as the type of developer influences resist development. The effect of megasonic agitation (frequency of 1 MHz) on the development of structures in PMMA was investigated for the developer 7:3 IPA/water. Compared to conventional dip development, structures developed with megasonic agitation showed larger feature sizes, indicating that the development rate was increased. However, performance characteristics were not enhanced: both contrast and sensitivity were found to be lower than after dip development in 7:3 IPA/water. © 2009 Elsevier B.V. All rights reserved.||Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms||URI:||http://scholarbank.nus.edu.sg/handle/10635/96475||ISSN:||0168583X||DOI:||10.1016/j.nimb.2009.03.045|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Aug 3, 2020
WEB OF SCIENCETM
checked on Jul 27, 2020
checked on Aug 1, 2020
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.