Digital IBIC - New spectroscopic modalities for ion-beam-induced charge imaging

Abstract

The first implementation of digital ion-beam-induced charge (IBIC) imaging is presented, which permits spectroscopic time-resolved IBIC imaging of charge transport in semiconductors. A digital IBIC system has been developed which uses a high-speed waveform digitiser to capture the pulse shapes produced by interactions of a 1μm resolution scanning microbeam in semiconductor samples. Using a variety of digital pulse shape analysis algorithms, quantitative images of charge signal amplitude, charge carrier lifetime, mobility and trapping phenomena can be acquired in real-time, with a time resolution of