Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2009.03.035
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dc.titleAdvanced applications in microphotonics using proton beam writing
dc.contributor.authorBettiol, A.A.
dc.contributor.authorChiam, S.Y.
dc.contributor.authorTeo, E.J.
dc.contributor.authorUdalagama, C.
dc.contributor.authorChan, S.F.
dc.contributor.authorHoi, S.K.
dc.contributor.authorvan Kan, J.A.
dc.contributor.authorBreese, M.B.H.
dc.contributor.authorWatt, F.
dc.date.accessioned2014-10-16T09:15:14Z
dc.date.available2014-10-16T09:15:14Z
dc.date.issued2009-06-15
dc.identifier.citationBettiol, A.A., Chiam, S.Y., Teo, E.J., Udalagama, C., Chan, S.F., Hoi, S.K., van Kan, J.A., Breese, M.B.H., Watt, F. (2009-06-15). Advanced applications in microphotonics using proton beam writing. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (12-13) : 2280-2284. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.035
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/95737
dc.description.abstractProton beam writing (PBW) is a powerful tool for prototyping microphotonic structures in a wide variety of materials including polymers, insulators, semiconductors and metals. Prototyping is achieved either through direct fabrication with the proton beam, or by the fabrication of a master that can be used for replication. In recent times we have explored the use of PBW for various advanced optical applications including fabrication of subwavelength metallic structures and metamaterials, direct write of silicon waveguides for mid IR applications and integrated waveguides for lab-on-a-chip devices. This paper will review the recent progress made in these areas with particular emphasis on the main advantages of using the PBW technique for these novel applications. © 2009 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nimb.2009.03.035
dc.sourceScopus
dc.subject42.70.Ce
dc.subject42.82.Et
dc.subject81.16.Nd
dc.subject85.40.Hp
dc.subjectLab-on-a-chip
dc.subjectMetamaterials
dc.subjectProton beam writing
dc.subjectSilicon photonics
dc.subjectWaveguides
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/j.nimb.2009.03.035
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume267
dc.description.issue12-13
dc.description.page2280-2284
dc.description.codenNIMBE
dc.identifier.isiut000267910500067
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