Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2007.09.031
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dc.titleA review of ion beam induced charge microscopy
dc.contributor.authorBreese, M.B.H.
dc.contributor.authorVittone, E.
dc.contributor.authorVizkelethy, G.
dc.contributor.authorSellin, P.J.
dc.date.accessioned2014-10-16T09:14:33Z
dc.date.available2014-10-16T09:14:33Z
dc.date.issued2007-11
dc.identifier.citationBreese, M.B.H., Vittone, E., Vizkelethy, G., Sellin, P.J. (2007-11). A review of ion beam induced charge microscopy. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 264 (2) : 345-360. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.09.031
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/95679
dc.description.abstractSince its development in the early 1990's, ion beam induced charge (IBIC) microscopy has found widespread applications in many microprobe laboratories for the analysis of microelectronic devices, dislocations, semiconductor radiation detectors, semi-insulating materials, high power transistors, charge-coupled arrays, solar cells, light emitting diodes, and in conjunction with Single Event Upset imaging. Several modalities of the techniques have been developed, such as lateral IBIC and time-resolved IBIC. The theoretical model of IBIC generation and collection has developed from a one-dimensional model of charge drift and diffusion to a detailed model of the motion of ion charge carriers in semiconductors and insulators. This paper reviews the current state-of-the-art of IBIC theory and applications. © 2007 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nimb.2007.09.031
dc.sourceScopus
dc.subjectCharge transport measurements
dc.subjectIBIC microscopy
dc.subjectNuclear microprobes
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/j.nimb.2007.09.031
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume264
dc.description.issue2
dc.description.page345-360
dc.description.codenNIMBE
dc.identifier.isiut000251873600022
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