Please use this identifier to cite or link to this item:
Title: Laser integrated measurement of surface roughness and micro-displacement
Authors: Wang, S.H. 
Tay, C.J. 
Quan, C. 
Shang, H.M. 
Zhou, Z.F.
Keywords: Light scattering
Non-contact measurement
Optical triangulation
Surface roughness
Issue Date: May-2000
Citation: Wang, S.H., Tay, C.J., Quan, C., Shang, H.M., Zhou, Z.F. (2000-05). Laser integrated measurement of surface roughness and micro-displacement. Measurement Science and Technology 11 (5) : 454-458. ScholarBank@NUS Repository.
Abstract: An optical method based on laser scattering and optical triangulation for measurement of surface roughness and micro-displacement measurement is proposed. The technique allows evaluation of surface roughness and micro-displacement of a specimen using just one device. The principle of the method and the basic instrumentation design are described and the validity of the principle is demonstrated by experimental evaluations. Results show that, for specimens with surface roughnesses (Ra) in the range 0.005-0.1 μm, displacements in the range ±300 μm can be readily measured.
Source Title: Measurement Science and Technology
ISSN: 09570233
DOI: 10.1088/0957-0233/11/5/302
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.