Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.280540
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dc.titleFooting reduction in the organic bottom anti-reflective coating implementation
dc.contributor.authorKo, T.-M.
dc.contributor.authorCheng, A.
dc.date.accessioned2014-10-09T08:22:33Z
dc.date.available2014-10-09T08:22:33Z
dc.date.issued1997
dc.identifier.citationKo, T.-M., Cheng, A. (1997). Footing reduction in the organic bottom anti-reflective coating implementation. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 196-206. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280540
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/91810
dc.description.abstractDuring the implementation of organic bottom anti-reflective coating (BARC) for i-line 0.35 μn critical layer fabrication, footing was observed after the development of the photoresist due to the reduction of reflectivity by the organic BARC. Footing was undesirable since it created difficulties in the subsequent etching steps. Two methods were attempted to reduce the footings. One method was to increase the reflectivity of the substrates by changing the thickness of the organic BARC. Another method was to carry out a descrum process after the lithographic processes. The nominal thickness of organic BARC in the manufacturing process was 1520 Å with a reflectivity of less than 5%. However, by increasing the organic BARC thickness to 2000 Å and 2500 Å, the reflectivity of the polycide substrates were increased to 13% and 8%, respectively. Experimental results showed that the increased reflectivity indeed helped to reduce the amount of footings. In the case of 2000 Å organic BARC, the footing was almost completely gone. Since these two different values of thickness were the local maximum and minimum on the thickness vs. reflectivity curves, they provided relatively wide processing latitudes for manufacturing. For the descrum experiments to reduce the footings, the photoresist profiles were significantly thinned down laterally while the heights of the developed photoresist were only slightly affected. Unfortunately, the magnitudes of the footings remained unchanged. Therefore, the descrum process did not seem to help to resolve the footing problems in the implementation of organic BARC.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.280540
dc.sourceScopus
dc.subjectComputer simulation
dc.subjectDescrum
dc.subjectFooting
dc.subjectOrganic barc
dc.subjectPhotoresist
dc.subjectPlanarization
dc.subjectReflectivity
dc.subjectResist profile
dc.subjectSidewall angle
dc.subjectSwing curve
dc.typeConference Paper
dc.contributor.departmentCHEMICAL ENGINEERING
dc.description.doi10.1117/12.280540
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume3183
dc.description.page196-206
dc.description.codenPSISD
dc.identifier.isiutA1997BJ57L00021
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