Please use this identifier to cite or link to this item:
Title: Measurement of thin film piezoelectric constants using x-ray diffraction technique
Authors: Yu, Y.H.
Lai, M.O. 
Lu, L. 
Issue Date: 2007
Citation: Yu, Y.H., Lai, M.O., Lu, L. (2007). Measurement of thin film piezoelectric constants using x-ray diffraction technique. Physica Scripta T T129 : 353-357. ScholarBank@NUS Repository.
Abstract: A new method to measure the piezoelectric constants of d33 f and d31 f of thin films using x-ray diffraction (XRD) is proposed. Piezoelectric constant d33 f is calculated from the measurement of change in out-of-plane lattice spacing of the piezoelectric films while piezoelectric constant d31 f is obtained from the change in the slope of dψ versus sin 2 ψ curves before and after applying an electric field over the film. This method improves the accuracy by directly measuring the strains in the films induced by the externally applied electric field instead of the surface displacement that could easily be interfered with by environment/vibration and surface morphology of the thin films. © 2007 The Royal Swedish Academy of Sciences.
Source Title: Physica Scripta T
ISSN: 02811847
DOI: 10.1088/0031-8949/2007/T129/078
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

checked on Feb 16, 2020

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.