Please use this identifier to cite or link to this item:
|Title:||Determination of the x-ray elastic constants of solid thin films||Authors:||Yu, Y.H.
|Issue Date:||1-Apr-2007||Citation:||Yu, Y.H., Lai, M.O., Lu, L. (2007-04-01). Determination of the x-ray elastic constants of solid thin films. Smart Materials and Structures 16 (2) : 487-492. ScholarBank@NUS Repository. https://doi.org/10.1088/0964-1726/16/2/029||Abstract:||A new experimental method for determining the x-ray elastic constants (S1 and (1/2)S2) of thin films is proposed. The curvatures of the single-crystal substrates before and after depositing thin films are first measured using a high-resolution x-ray rocking curve technique with high-quality monochromatic and high-intensity synchrotron radiation. The residual stresses in the films are then calculated from the change in substrate curvature based on the well-known modified Stoney's equation. The formulae for calculation of S1 and (1/2)S2 are deduced based on measured residual stress and the lattice spacing dψ versus sin2ψ curves before and after a mechanical loading, while the magnitude of the external loading does not need to be known. Values of (1/2)S2 of films can even be obtained without loading. Pb(Zr 0.52Ti0.48) and LaNiO3 films grown on a single-crystal silicon substrate using pulsed laser deposition are employed to demonstrate the measurement method. © IOP Publishing Ltd.||Source Title:||Smart Materials and Structures||URI:||http://scholarbank.nus.edu.sg/handle/10635/84970||ISSN:||09641726||DOI:||10.1088/0964-1726/16/2/029|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Oct 16, 2019
WEB OF SCIENCETM
checked on Oct 8, 2019
checked on Oct 12, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.