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Title: Determination of the x-ray elastic constants of solid thin films
Authors: Yu, Y.H.
Lai, M.O. 
Lu, L. 
Issue Date: 1-Apr-2007
Citation: Yu, Y.H., Lai, M.O., Lu, L. (2007-04-01). Determination of the x-ray elastic constants of solid thin films. Smart Materials and Structures 16 (2) : 487-492. ScholarBank@NUS Repository.
Abstract: A new experimental method for determining the x-ray elastic constants (S1 and (1/2)S2) of thin films is proposed. The curvatures of the single-crystal substrates before and after depositing thin films are first measured using a high-resolution x-ray rocking curve technique with high-quality monochromatic and high-intensity synchrotron radiation. The residual stresses in the films are then calculated from the change in substrate curvature based on the well-known modified Stoney's equation. The formulae for calculation of S1 and (1/2)S2 are deduced based on measured residual stress and the lattice spacing dψ versus sin2ψ curves before and after a mechanical loading, while the magnitude of the external loading does not need to be known. Values of (1/2)S2 of films can even be obtained without loading. Pb(Zr 0.52Ti0.48) and LaNiO3 films grown on a single-crystal silicon substrate using pulsed laser deposition are employed to demonstrate the measurement method. © IOP Publishing Ltd.
Source Title: Smart Materials and Structures
ISSN: 09641726
DOI: 10.1088/0964-1726/16/2/029
Appears in Collections:Staff Publications

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