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Title: Design of an optical probe for testing surface roughness and micro-displacement
Authors: Wang, S.H. 
Jin, C.J.
Tay, C.J. 
Quan, C. 
Shang, H.M. 
Keywords: Light scattering
Optical probe
Optical triangulation
Surface roughness
Issue Date: Oct-2001
Citation: Wang, S.H., Jin, C.J., Tay, C.J., Quan, C., Shang, H.M. (2001-10). Design of an optical probe for testing surface roughness and micro-displacement. Precision Engineering 25 (4) : 258-265. ScholarBank@NUS Repository.
Abstract: This paper presents a practical monitoring tool for measurements of surface roughness and micro-displacement. An optical probe of the methods based on light scattering for measuring surface roughness and optical triangulation for measuring micro-displacement is described. The proposed technique allows evaluation of surface roughness and micro-displacement of specimen by using just one device. The theoretical models of surface roughness and micro-displacement measurements have been established for the probe. The measuring principles applied in the design are described in detail and the validity of the design is demonstrated by experimental evaluations. The experimental results show that, for specimens with surface roughnesses Ra in the range from 0.005μm to 0.1 μm, micro-displacement measurements in the linear range of ± 300μm can be obtained. © 2001 Elsevier Science Inc. All rights reserved.
Source Title: Precision Engineering
ISSN: 01416359
DOI: 10.1016/S0141-6359(01)00076-9
Appears in Collections:Staff Publications

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