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Title: Dependence of structure and properties of Ba(Zr0.25Ti 0.75)O3 thin films on temperature and post-annealing
Authors: Doan, V.D.O.
Lai, M.O. 
Lu, L. 
Issue Date: 21-Oct-2008
Citation: Doan, V.D.O., Lai, M.O., Lu, L. (2008-10-21). Dependence of structure and properties of Ba(Zr0.25Ti 0.75)O3 thin films on temperature and post-annealing. Journal of Physics D: Applied Physics 41 (20) : -. ScholarBank@NUS Repository.
Abstract: Ba(Zr0.25Ti0.75)O3 thin film was deposited on a LaNiO3-coated SiO2/Si substrate by pulsed-laser deposition. Crystallinity, (h 0 0) texture and surface texture were found to be improved, and the out-of-plane lattice parameter d, polarization P, dielectric constant εr(0) and tunability nr were found to increase with increasing deposition temperature or post-annealing duration. Improvement in crystallinity is believed to be the reason for the improved properties. The increase in the out-of-plane lattice parameter of the highly (h 0 0) textured thin film causes the increases in nr and P, while the changes in εr and nr are closely associated with the changes in εr(0) and P. A high tunability of 76% measured at the frequency of 1 MHz could be achieved for the film deposited and annealed at 640 °C, showing that Ba(Zr0.25Ti0.75)O3 thin film would be a potential candidate for future tunable devices. © 2008 IOP Publishing Ltd.
Source Title: Journal of Physics D: Applied Physics
ISSN: 00223727
DOI: 10.1088/0022-3727/41/20/205408
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