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https://doi.org/10.1109/MWSYM.2005.1516582
DC Field | Value | |
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dc.title | Very high density RF MIM capacitor compatible with VLSI | |
dc.contributor.author | Chiang, K.C. | |
dc.contributor.author | Lai, C.H. | |
dc.contributor.author | Chin, A. | |
dc.contributor.author | Kao, H.L. | |
dc.contributor.author | McAlister, S.P. | |
dc.contributor.author | Chi, C.C. | |
dc.date.accessioned | 2014-10-07T04:51:40Z | |
dc.date.available | 2014-10-07T04:51:40Z | |
dc.date.issued | 2005 | |
dc.identifier.citation | Chiang, K.C., Lai, C.H., Chin, A., Kao, H.L., McAlister, S.P., Chi, C.C. (2005). Very high density RF MIM capacitor compatible with VLSI. IEEE MTT-S International Microwave Symposium Digest 2005 : 287-290. ScholarBank@NUS Repository. https://doi.org/10.1109/MWSYM.2005.1516582 | |
dc.identifier.isbn | 0780388461 | |
dc.identifier.issn | 0149645X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/84349 | |
dc.description.abstract | We have fabricated RF MEM capacitors, using high-κ TiTaO as the dielectric, which show a record high density of 20 fF/μm 2. In addition, the capacitors display a small capacitance reduction of only 3.6% over the 100 kHz to 20 GHz range, a low leakage current of 8 pF and a high Q of 120. This was for a typical large 8 pF TiTaO MIM capacitor. The small voltage dependence of the capacitance (ΔC/C) of 770 ppm at 2 GHz, shows that these MIM capacitors are useful for high-precision RF circuits. © 2005 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/MWSYM.2005.1516582 | |
dc.source | Scopus | |
dc.subject | Capacitor | |
dc.subject | MIM | |
dc.subject | RF | |
dc.subject | TiTaO | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/MWSYM.2005.1516582 | |
dc.description.sourcetitle | IEEE MTT-S International Microwave Symposium Digest | |
dc.description.volume | 2005 | |
dc.description.page | 287-290 | |
dc.description.coden | IMIDD | |
dc.identifier.isiut | 000234561200066 | |
Appears in Collections: | Staff Publications |
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