Please use this identifier to cite or link to this item: https://doi.org/10.1109/FREQ.2008.4623079
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dc.titleNonlinear behavior of Lamé-mode SOI bulk resonator
dc.contributor.authorShao, L.C.
dc.contributor.authorPalaniapan, M.
dc.contributor.authorKhine, L.
dc.contributor.authorTan, W.W.
dc.date.accessioned2014-10-07T04:47:47Z
dc.date.available2014-10-07T04:47:47Z
dc.date.issued2008
dc.identifier.citationShao, L.C., Palaniapan, M., Khine, L., Tan, W.W. (2008). Nonlinear behavior of Lamé-mode SOI bulk resonator. 2008 IEEE International Frequency Control Symposium, FCS : 646-650. ScholarBank@NUS Repository. https://doi.org/10.1109/FREQ.2008.4623079
dc.identifier.isbn9781424417957
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/84013
dc.description.abstractIn this paper, we report for the first time the detailed analysis of the nonlinear behavior of a Lamé-mode SOI bulk resonator. The measured resonant frequency of the resonator was 6.35MHz with a quality factor of 1.7 million in the ambient pressure of 0.02Pa. We used the two-step semi-analytic approach to characterize the model parameters of the resonator and the nonlinear model of the resonator was verified by the experimental results. Our study shows that the Lamé-mode bulk resonator has three orders of magnitude larger maximum energy storage capability than the flexural beam resonator, leading to improved overall phase noise performance of the resonator-based oscillator. © 2008 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/FREQ.2008.4623079
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/FREQ.2008.4623079
dc.description.sourcetitle2008 IEEE International Frequency Control Symposium, FCS
dc.description.page646-650
dc.identifier.isiut000261285400134
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