Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2011.02.028
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dc.titleNEMS diaphragm sensors integrated with triple-nano-ring resonator
dc.contributor.authorLi, B.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:47:41Z
dc.date.available2014-10-07T04:47:41Z
dc.date.issued2011-12
dc.identifier.citationLi, B., Lee, C. (2011-12). NEMS diaphragm sensors integrated with triple-nano-ring resonator. Sensors and Actuators, A: Physical 172 (1) : 61-68. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.02.028
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/84004
dc.description.abstractTwo types of circular diaphragm, made by Si and Si/SiO2, integrated with hexagonal photonic crystal (PhC) lattice with triple-nano-ring (TNR) resonator created at the centre are proposed as nano-scale force and pressure sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak in both the cases and with Q-factor of 1602 and 1737, respectively. The resonant wavelength peak experience red shifts upon the applied load on the circular diaphragm along the normal direction, in terms of a 2nd-order polynomial relationship. The devices can detect a wide range of applied load. Si diaphragm based micro force sensor gives minimum detectable force of 0.847 μN in the region of applied force from 10 to 20 μN. Si/SiO2 diaphragm based pressure sensor gives minimum detectable pressure of 4.17 MPa in the region of applied pressure from 20 to 40 MPa. From the derived wavelength shift versus a given centre displacement of the diaphragm, Si diaphragm based sensor shows higher sensitivity than Si/SiO 2 diaphragm sensor. © 2011 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2011.02.028
dc.sourceScopus
dc.subjectFilters
dc.subjectPhotonic crystal
dc.subjectRing resonators
dc.subjectSensors
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.sna.2011.02.028
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume172
dc.description.issue1
dc.description.page61-68
dc.description.codenSAAPE
dc.identifier.isiut000298465100011
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