Please use this identifier to cite or link to this item:
Title: NEMS diaphragm sensors integrated with triple-nano-ring resonator
Authors: Li, B.
Lee, C. 
Keywords: Filters
Photonic crystal
Ring resonators
Issue Date: Dec-2011
Citation: Li, B., Lee, C. (2011-12). NEMS diaphragm sensors integrated with triple-nano-ring resonator. Sensors and Actuators, A: Physical 172 (1) : 61-68. ScholarBank@NUS Repository.
Abstract: Two types of circular diaphragm, made by Si and Si/SiO2, integrated with hexagonal photonic crystal (PhC) lattice with triple-nano-ring (TNR) resonator created at the centre are proposed as nano-scale force and pressure sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak in both the cases and with Q-factor of 1602 and 1737, respectively. The resonant wavelength peak experience red shifts upon the applied load on the circular diaphragm along the normal direction, in terms of a 2nd-order polynomial relationship. The devices can detect a wide range of applied load. Si diaphragm based micro force sensor gives minimum detectable force of 0.847 μN in the region of applied force from 10 to 20 μN. Si/SiO2 diaphragm based pressure sensor gives minimum detectable pressure of 4.17 MPa in the region of applied pressure from 20 to 40 MPa. From the derived wavelength shift versus a given centre displacement of the diaphragm, Si diaphragm based sensor shows higher sensitivity than Si/SiO 2 diaphragm sensor. © 2011 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
ISSN: 09244247
DOI: 10.1016/j.sna.2011.02.028
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.


checked on Jan 20, 2022


checked on Jan 20, 2022

Page view(s)

checked on Jan 20, 2022

Google ScholarTM



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.