Please use this identifier to cite or link to this item:
https://doi.org/10.1142/S0219581X10006867
DC Field | Value | |
---|---|---|
dc.title | Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching | |
dc.contributor.author | Si, G.Y. | |
dc.contributor.author | Danner, A.J. | |
dc.contributor.author | Teng, J.H. | |
dc.contributor.author | Ang, S.S. | |
dc.contributor.author | Chew, A.B. | |
dc.contributor.author | Dogheche, E. | |
dc.date.accessioned | 2014-10-07T04:47:37Z | |
dc.date.available | 2014-10-07T04:47:37Z | |
dc.date.issued | 2010-08 | |
dc.identifier.citation | Si, G.Y., Danner, A.J., Teng, J.H., Ang, S.S., Chew, A.B., Dogheche, E. (2010-08). Nanoscale arrays in lithium niobate fabricated by interference lithography and dry etching. International Journal of Nanoscience 9 (4) : 311-315. ScholarBank@NUS Repository. https://doi.org/10.1142/S0219581X10006867 | |
dc.identifier.issn | 0219581X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83998 | |
dc.description.abstract | Channel waveguides have been fabricated in x-cut lithium niobate (LiNbO3) by proton exchange (PE) method and optically measured. The thickness and the optical constants of the thin PE layer were characterized using a prism coupling technique. The PE area was plasma etched and a 2.775-μm total etching depth was achieved. The measured average etching rate is 92.5 nm/min. One- and two-dimensional dense arrays of LiNbO3 nanostructures have also been fabricated by using interference lithography (IL) and inductively coupled plasma reactive ion etching (ICP-RIE) techniques. © 2010 World Scientific Publishing Company. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1142/S0219581X10006867 | |
dc.source | Scopus | |
dc.subject | interference lithography | |
dc.subject | LiNbO3 dense arrays | |
dc.subject | plasma etching | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1142/S0219581X10006867 | |
dc.description.sourcetitle | International Journal of Nanoscience | |
dc.description.volume | 9 | |
dc.description.issue | 4 | |
dc.description.page | 311-315 | |
dc.identifier.isiut | 000216785500013 | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.