Multiple-gate In 0.53Ga 0.47As Channel n-MOSFETs with self-aligned Ni-InGaAs contacts

Abstract

Sub-100 nm multiple-gate In 0.53Ga 0.47As channel n-MOSFETs with self-aligned Ni-InGaAs contacts were demonstrated for the first time. With self-aligned Ni-InGaAs contacts formed on in-situ doped n ++ In 0.53Ga 0.47As source and drain, the device exhibits low series resistance of 364 Ω·μm. The multiple-gate device with 50 nm channel length has a drive current of more than 411 μA/μm at V D = 0.7 V and V G = 0.7 V. The device also shows a peak extrinsic transconductance G m of 590 μS/μm at V D = 0.5 V. ©The Electrochemical Society.