Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.proeng.2011.12.173
Title: Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator
Authors: Koh, K.H.
Kobayashi, T.
Liu, H.
Lee, C. 
Keywords: Micro-electro-mechanical systems (MEMS)
Optical MEMS
Piezoelectric actuator
PZT
Issue Date: 2011
Citation: Koh, K.H., Kobayashi, T., Liu, H., Lee, C. (2011). Investigation of a piezoelectric driven MEMS mirror based on single S-shaped PZT actuator. Procedia Engineering 25 : 701-704. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proeng.2011.12.173
Abstract: A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm × 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V pp are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror. © 2011 Published by Elsevier Ltd.
Source Title: Procedia Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/83861
ISSN: 18777058
DOI: 10.1016/j.proeng.2011.12.173
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