Initial results on the spectroscopic SEM concept

Abstract

Initial experimental results are described for a Spectroscopic Scanning Electron Microscope (SPSSEM). This type of instrument can provide images with a resolution of a few nm, with simultaneous acquisition of the full energy spectrum of scattered electrons. It contains a SEM column, magnetic prism beam separator, and mixed-field retarding objective lens. The described experimental results confirm earlier simulation predictions that a circular beam separator used in a SPSSEM setup can form a final probe with a radius of a few nm or better over a 1 μm × 1 μm field-of-view, with a numerical aperture of 1 mrad and an energy spread of 10-4. These results represent initial experimental confirmation of the SPSSEM concept. The next step will be to obtain experimental spectra from the scattered electrons. © 2008 Elsevier B.V. All rights reserved.