Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.2004085
DC FieldValue
dc.titleFree-standing monolithic LiNbO3 photonic crystal slabs
dc.contributor.authorJun, D.
dc.contributor.authorVang, S.K.
dc.contributor.authorHussian, S.
dc.contributor.authorHongwei, G.
dc.contributor.authorThor, L.S.
dc.contributor.authorPng, C.E.
dc.contributor.authorNing, X.
dc.contributor.authorBettiol, A.A.
dc.contributor.authorDanner, A.J.
dc.date.accessioned2014-10-07T04:44:42Z
dc.date.available2014-10-07T04:44:42Z
dc.date.issued2013
dc.identifier.citationJun, D., Vang, S.K., Hussian, S., Hongwei, G., Thor, L.S., Png, C.E., Ning, X., Bettiol, A.A., Danner, A.J. (2013). Free-standing monolithic LiNbO3 photonic crystal slabs. Proceedings of SPIE - The International Society for Optical Engineering 8632 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.2004085
dc.identifier.isbn9780819494016
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83746
dc.description.abstractIn this work, we demonstrate a monolithic approach to fabricate free-standing LiNbO3 photonic crystal (PhC) slabs. Ion implantation is first applied to form a buried lattice-damage layer at a specified depth in bulk LiNbO3. Photonic crystal slabs are then made with FIB milling followed by wet etching. A high etching rate of 100 nm/min for the implanted layer has been obtained. A vertical PhC profile has been achieved because the bottoms of the milled cones were truncated by an air gap, with a measured slope angle of the hole sidewalls at 89o. Numerical simulation and free-space illumination measurements of the reflectance spectrum over a broadband wavelength were performed to analyse the properties of various PhC slabs. The free-standing LiNbO3 structures make them easily incorporated into MEMS and show potential applications for tunable optical filters, sensors, and quantum optics applications where high quality, single crystal LiNbO3 is needed. © 2013 SPIE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.2004085
dc.sourceScopus
dc.subjectGuided resonance
dc.subjectIon implantation
dc.subjectLithium niobate(LiNbO3)
dc.subjectPhotonic crystal slabs
dc.typeConference Paper
dc.contributor.departmentPHYSICS
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1117/12.2004085
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume8632
dc.description.page-
dc.description.codenPSISD
dc.identifier.isiut000322962900011
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

2
checked on Apr 6, 2020

WEB OF SCIENCETM
Citations

2
checked on Mar 30, 2020

Page view(s)

86
checked on Mar 29, 2020

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.