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https://doi.org/10.1117/12.2004085
Title: | Free-standing monolithic LiNbO3 photonic crystal slabs | Authors: | Jun, D. Vang, S.K. Hussian, S. Hongwei, G. Thor, L.S. Png, C.E. Ning, X. Bettiol, A.A. Danner, A.J. |
Keywords: | Guided resonance Ion implantation Lithium niobate(LiNbO3) Photonic crystal slabs |
Issue Date: | 2013 | Citation: | Jun, D., Vang, S.K., Hussian, S., Hongwei, G., Thor, L.S., Png, C.E., Ning, X., Bettiol, A.A., Danner, A.J. (2013). Free-standing monolithic LiNbO3 photonic crystal slabs. Proceedings of SPIE - The International Society for Optical Engineering 8632 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.2004085 | Abstract: | In this work, we demonstrate a monolithic approach to fabricate free-standing LiNbO3 photonic crystal (PhC) slabs. Ion implantation is first applied to form a buried lattice-damage layer at a specified depth in bulk LiNbO3. Photonic crystal slabs are then made with FIB milling followed by wet etching. A high etching rate of 100 nm/min for the implanted layer has been obtained. A vertical PhC profile has been achieved because the bottoms of the milled cones were truncated by an air gap, with a measured slope angle of the hole sidewalls at 89o. Numerical simulation and free-space illumination measurements of the reflectance spectrum over a broadband wavelength were performed to analyse the properties of various PhC slabs. The free-standing LiNbO3 structures make them easily incorporated into MEMS and show potential applications for tunable optical filters, sensors, and quantum optics applications where high quality, single crystal LiNbO3 is needed. © 2013 SPIE. | Source Title: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/83746 | ISBN: | 9780819494016 | ISSN: | 0277786X | DOI: | 10.1117/12.2004085 |
Appears in Collections: | Staff Publications |
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