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Title: Free-standing monolithic LiNbO3 photonic crystal slabs
Authors: Jun, D.
Vang, S.K.
Hussian, S.
Hongwei, G.
Thor, L.S.
Png, C.E.
Ning, X. 
Bettiol, A.A. 
Danner, A.J. 
Keywords: Guided resonance
Ion implantation
Lithium niobate(LiNbO3)
Photonic crystal slabs
Issue Date: 2013
Citation: Jun, D., Vang, S.K., Hussian, S., Hongwei, G., Thor, L.S., Png, C.E., Ning, X., Bettiol, A.A., Danner, A.J. (2013). Free-standing monolithic LiNbO3 photonic crystal slabs. Proceedings of SPIE - The International Society for Optical Engineering 8632 : -. ScholarBank@NUS Repository.
Abstract: In this work, we demonstrate a monolithic approach to fabricate free-standing LiNbO3 photonic crystal (PhC) slabs. Ion implantation is first applied to form a buried lattice-damage layer at a specified depth in bulk LiNbO3. Photonic crystal slabs are then made with FIB milling followed by wet etching. A high etching rate of 100 nm/min for the implanted layer has been obtained. A vertical PhC profile has been achieved because the bottoms of the milled cones were truncated by an air gap, with a measured slope angle of the hole sidewalls at 89o. Numerical simulation and free-space illumination measurements of the reflectance spectrum over a broadband wavelength were performed to analyse the properties of various PhC slabs. The free-standing LiNbO3 structures make them easily incorporated into MEMS and show potential applications for tunable optical filters, sensors, and quantum optics applications where high quality, single crystal LiNbO3 is needed. © 2013 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
ISBN: 9780819494016
ISSN: 0277786X
DOI: 10.1117/12.2004085
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