Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/83708
DC FieldValue
dc.titleEpitaxial growth of single crystalline Ge films on GaAs substrates for CMOS device integration
dc.contributor.authorChin, H.-C.
dc.contributor.authorZhu, M.
dc.contributor.authorSamudra, G.
dc.contributor.authorYeo, Y.-C.
dc.date.accessioned2014-10-07T04:44:17Z
dc.date.available2014-10-07T04:44:17Z
dc.date.issued2008
dc.identifier.citationChin, H.-C.,Zhu, M.,Samudra, G.,Yeo, Y.-C. (2008). Epitaxial growth of single crystalline Ge films on GaAs substrates for CMOS device integration. Materials Research Society Symposium Proceedings 1068 : 247-252. ScholarBank@NUS Repository.
dc.identifier.isbn9781605110387
dc.identifier.issn02729172
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83708
dc.description.abstractWe report a novel chemical vapor deposition (CVD) process for epitaxial growth of Ge film on GaAs substrate. The resultant layer exhibits device level quality, as shown by highresolution transmission electron microscopy (HRTEM), Raman spectroscopy, high-resolution X-ray diffraction (HRXRD). In addition, atomic force microscopy (AFM) scanning indicates low RMS surface roughness of 5 Å. Secondary ion mass spectrometry (SIMS) reveals negligible out-diffusion of Ga and As into the Ge epilayer. By employing silane passivation, Ge pMOSFET with TaN/HfO2 gate stack was fabricated on Ge/GaAs heterostructure for the first time, showing excellent output and pinch-off characteristics. A GaAs channel n-MOSFET was also fabricated, using similar SiH4 treatment during gate stack formation. These results reveal a potential solution to integrate Ge p-channel and GaAs n-channel MOSFET for advanced CMOS applications. © 2008 Materials Research Society.
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.sourcetitleMaterials Research Society Symposium Proceedings
dc.description.volume1068
dc.description.page247-252
dc.description.codenMRSPD
dc.identifier.isiutNOT_IN_WOS
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

Page view(s)

73
checked on Nov 30, 2019

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.