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Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2011.6031057
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dc.titleDevelopment of CMOS MEMS thermal bimorph actuator for driving microlens
dc.contributor.authorKoh, K.H.
dc.contributor.authorLee, C.
dc.contributor.authorLu, J.-H.
dc.contributor.authorChen, C.-C.
dc.date.accessioned2014-10-07T04:43:19Z
dc.date.available2014-10-07T04:43:19Z
dc.date.issued2011
dc.identifier.citationKoh, K.H.,Lee, C.,Lu, J.-H.,Chen, C.-C. (2011). Development of CMOS MEMS thermal bimorph actuator for driving microlens. International Conference on Optical MEMS and Nanophotonics : 153-154. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2011.6031057" target="_blank">https://doi.org/10.1109/OMEMS.2011.6031057</a>
dc.identifier.isbn9781457703362
dc.identifier.issn21605033
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83625
dc.description.abstractA CMOS MEMS based thermal actuator is developed by using bimorph with embedded SiO2 and inverted-connected metal line adopted from CMOS materials. Vertical displacement of 47μm and power consumption of 139mW is obtained at 3Vdc. © 2011 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/OMEMS.2011.6031057
dc.sourceScopus
dc.subjectMicrolens
dc.subjectOptical Microelectromechanical Systems
dc.subjectThermal Actuator
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/OMEMS.2011.6031057
dc.description.sourcetitleInternational Conference on Optical MEMS and Nanophotonics
dc.description.page153-154
dc.identifier.isiutNOT_IN_WOS
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