Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/83624
DC Field | Value | |
---|---|---|
dc.title | Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators | |
dc.contributor.author | Koh, K.H. | |
dc.contributor.author | Kobayashi, T. | |
dc.contributor.author | Lee, C. | |
dc.date.accessioned | 2014-10-07T04:43:18Z | |
dc.date.available | 2014-10-07T04:43:18Z | |
dc.date.issued | 2011 | |
dc.identifier.citation | Koh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository. | |
dc.identifier.isbn | 9781612842882 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83624 | |
dc.description.abstract | Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications. © 2011 National Sun Yat-Sen Univ. | |
dc.source | Scopus | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.sourcetitle | 16th Opto-Electronics and Communications Conference, OECC 2011 | |
dc.description.page | 323-324 | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.