Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/83624
Title: Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators
Authors: Koh, K.H.
Kobayashi, T.
Lee, C. 
Issue Date: 2011
Citation: Koh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository.
Abstract: Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications. © 2011 National Sun Yat-Sen Univ.
Source Title: 16th Opto-Electronics and Communications Conference, OECC 2011
URI: http://scholarbank.nus.edu.sg/handle/10635/83624
ISBN: 9781612842882
Appears in Collections:Staff Publications

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