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|Title:||Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators||Authors:||Koh, K.H.
|Issue Date:||2011||Citation:||Koh, K.H.,Kobayashi, T.,Lee, C. (2011). Development of actuation mechanisms for MEMS mirror using PZT thin film cantilever actuators. 16th Opto-Electronics and Communications Conference, OECC 2011 : 323-324. ScholarBank@NUS Repository.||Abstract:||Novel actuation mechanisms for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr,Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for variable optical attenuation and 2-D raster scanning applications. © 2011 National Sun Yat-Sen Univ.||Source Title:||16th Opto-Electronics and Communications Conference, OECC 2011||URI:||http://scholarbank.nus.edu.sg/handle/10635/83624||ISBN:||9781612842882|
|Appears in Collections:||Staff Publications|
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