Computational study of NEMS diaphragm sensor using triple nano-ring resonator

Abstract

We propose a circular Si diaphragm of hexagonal photonic crystal (PhC) lattice with triple nano-ring (TNR) resonator created at the center as a nano-scale force sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak with Q-factor of 1412. The resonant wavelength peak shifts upon the applied force at the centre of the circular diaphragm along the normal direction in terms of a 2nd-order polynomial relationship. This device can detect wide range of applied force and gives minimum detectable force of 0.847 μN in the region of applied force from 15 to 20 μN. An interesting dual channel reversibility (DCR) phenomenon is reported. More clearly, resonant peaks of the same wavelength are obtained when the input port is swapped between the two waveguides, i.e., the waveguide on the single nano-ring side and the other waveguide on the horizontal nano-rings side.