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https://doi.org/10.1109/MEMSYS.2013.6474270
Title: | CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers | Authors: | Zhou, H. Kropelnicki, P. Tsai, J.M. Lee, C. |
Issue Date: | 2013 | Citation: | Zhou, H.,Kropelnicki, P.,Tsai, J.M.,Lee, C. (2013). CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 429-432. ScholarBank@NUS Repository. https://doi.org/10.1109/MEMSYS.2013.6474270 | Abstract: | An infrared sensor based on a vertically integrated double layer (VIDL) thermopile which comprises of 96 thermocouples on a suspended membrane has been designed and fabricated by a CMOS-compatible process. The properties of this thermopile are characterized. The responsivity (Rs) of the VIDL thermopile is 202.8V/W and the detectivity (D*) of it is 2.85×10 8 cmHz1/2 W-1. © 2013 IEEE. | Source Title: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | URI: | http://scholarbank.nus.edu.sg/handle/10635/83552 | ISBN: | 9781467356558 | ISSN: | 10846999 | DOI: | 10.1109/MEMSYS.2013.6474270 |
Appears in Collections: | Staff Publications |
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