Please use this identifier to cite or link to this item:
https://doi.org/10.1109/NEMS.2013.6559793
DC Field | Value | |
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dc.title | A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications | |
dc.contributor.author | Soon, B.W. | |
dc.contributor.author | Singh, N. | |
dc.contributor.author | Tsai, J.M. | |
dc.contributor.author | Lee, C. | |
dc.date.accessioned | 2014-10-07T04:40:04Z | |
dc.date.available | 2014-10-07T04:40:04Z | |
dc.date.issued | 2013 | |
dc.identifier.citation | Soon, B.W.,Singh, N.,Tsai, J.M.,Lee, C. (2013). A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 : 562-565. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/NEMS.2013.6559793" target="_blank">https://doi.org/10.1109/NEMS.2013.6559793</a> | |
dc.identifier.isbn | 9781467363525 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83334 | |
dc.description.abstract | We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application. © 2013 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/NEMS.2013.6559793 | |
dc.source | Scopus | |
dc.subject | Nanoelectromechanical systems | |
dc.subject | NEMS | |
dc.subject | non-volatile memory | |
dc.subject | NVM | |
dc.subject | relay | |
dc.subject | switch | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/NEMS.2013.6559793 | |
dc.description.sourcetitle | 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 | |
dc.description.page | 562-565 | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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