Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2013.6559793
DC FieldValue
dc.titleA bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications
dc.contributor.authorSoon, B.W.
dc.contributor.authorSingh, N.
dc.contributor.authorTsai, J.M.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:40:04Z
dc.date.available2014-10-07T04:40:04Z
dc.date.issued2013
dc.identifier.citationSoon, B.W.,Singh, N.,Tsai, J.M.,Lee, C. (2013). A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 : 562-565. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/NEMS.2013.6559793" target="_blank">https://doi.org/10.1109/NEMS.2013.6559793</a>
dc.identifier.isbn9781467363525
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83334
dc.description.abstractWe present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application. © 2013 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/NEMS.2013.6559793
dc.sourceScopus
dc.subjectNanoelectromechanical systems
dc.subjectNEMS
dc.subjectnon-volatile memory
dc.subjectNVM
dc.subjectrelay
dc.subjectswitch
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/NEMS.2013.6559793
dc.description.sourcetitle8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
dc.description.page562-565
dc.identifier.isiutNOT_IN_WOS
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