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|Title:||A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional||Authors:||Koh, K.H.
Optical Microelectromechanical Systems
|Issue Date:||2011||Citation:||Koh, K.H.,Kobayashi, T.,Lee, C. (2011). A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode - Bending and torsional. International Conference on Optical MEMS and Nanophotonics : 41-42. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031040||Abstract:||A novel actuation mechanism for a gold-coated MEMS mirror driven by 1x10 piezoelectric Pb(Zr, Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for 2-D raster scanning applications. © 2011 IEEE.||Source Title:||International Conference on Optical MEMS and Nanophotonics||URI:||http://scholarbank.nus.edu.sg/handle/10635/83320||ISBN:||9781457703362||ISSN:||21605033||DOI:||10.1109/OMEMS.2011.6031040|
|Appears in Collections:||Staff Publications|
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