Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.proche.2009.07.325
DC FieldValue
dc.titleA 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators
dc.contributor.authorKoh, K.H.
dc.contributor.authorKobayashi, T.
dc.contributor.authorHsiao, F.-L.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:39:54Z
dc.date.available2014-10-07T04:39:54Z
dc.date.issued2009-09
dc.identifier.citationKoh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325
dc.identifier.issn18766196
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83319
dc.description.abstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators. © 2009.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.proche.2009.07.325
dc.sourceScopus
dc.subjectMicroelectromechanical Systems (MEMS)
dc.subjectOptical MEMS
dc.subjectPiezoelectric actuator
dc.subjectPZT
dc.subjectScanning mirror
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.proche.2009.07.325
dc.description.sourcetitleProcedia Chemistry
dc.description.volume1
dc.description.issue1
dc.description.page1303-1306
dc.identifier.isiut000275995600108
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

17
checked on May 30, 2023

WEB OF SCIENCETM
Citations

15
checked on May 30, 2023

Page view(s)

255
checked on May 25, 2023

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.