Please use this identifier to cite or link to this item:
https://doi.org/10.1016/j.proche.2009.07.325
DC Field | Value | |
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dc.title | A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators | |
dc.contributor.author | Koh, K.H. | |
dc.contributor.author | Kobayashi, T. | |
dc.contributor.author | Hsiao, F.-L. | |
dc.contributor.author | Lee, C. | |
dc.date.accessioned | 2014-10-07T04:39:54Z | |
dc.date.available | 2014-10-07T04:39:54Z | |
dc.date.issued | 2009-09 | |
dc.identifier.citation | Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325 | |
dc.identifier.issn | 18766196 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83319 | |
dc.description.abstract | A silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators. © 2009. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.proche.2009.07.325 | |
dc.source | Scopus | |
dc.subject | Microelectromechanical Systems (MEMS) | |
dc.subject | Optical MEMS | |
dc.subject | Piezoelectric actuator | |
dc.subject | PZT | |
dc.subject | Scanning mirror | |
dc.type | Conference Paper | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1016/j.proche.2009.07.325 | |
dc.description.sourcetitle | Procedia Chemistry | |
dc.description.volume | 1 | |
dc.description.issue | 1 | |
dc.description.page | 1303-1306 | |
dc.identifier.isiut | 000275995600108 | |
Appears in Collections: | Staff Publications |
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