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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.proche.2009.07.325
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dc.titleA 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators
dc.contributor.authorKoh, K.H.
dc.contributor.authorKobayashi, T.
dc.contributor.authorHsiao, F.-L.
dc.contributor.authorLee, C.
dc.date.accessioned2014-10-07T04:39:54Z
dc.date.available2014-10-07T04:39:54Z
dc.date.issued2009-09
dc.identifier.citationKoh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325
dc.identifier.issn18766196
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83319
dc.description.abstractA silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators. © 2009.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.proche.2009.07.325
dc.sourceScopus
dc.subjectMicroelectromechanical Systems (MEMS)
dc.subjectOptical MEMS
dc.subjectPiezoelectric actuator
dc.subjectPZT
dc.subjectScanning mirror
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.proche.2009.07.325
dc.description.sourcetitleProcedia Chemistry
dc.description.volume1
dc.description.issue1
dc.description.page1303-1306
dc.identifier.isiut000275995600108
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