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https://doi.org/10.1016/j.proche.2009.07.325
| Title: | A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators | Authors: | Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. |
Keywords: | Microelectromechanical Systems (MEMS) Optical MEMS Piezoelectric actuator PZT Scanning mirror |
Issue Date: | Sep-2009 | Citation: | Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325 | Abstract: | A silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators. © 2009. | Source Title: | Procedia Chemistry | URI: | http://scholarbank.nus.edu.sg/handle/10635/83319 | ISSN: | 18766196 | DOI: | 10.1016/j.proche.2009.07.325 |
| Appears in Collections: | Staff Publications |
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