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Title: Ultimate resolution limits for scanning electron microscope immersion objective lenses
Authors: Khursheed, A. 
Keywords: Low voltage scanning electron microscopy
Issue Date: 2002
Citation: Khursheed, A. (2002). Ultimate resolution limits for scanning electron microscope immersion objective lenses. Optik (Jena) 113 (2) : 67-77. ScholarBank@NUS Repository.
Abstract: This paper sets out to establish resolution limits for electron objective immersion lenses that can be used for high resolution scanning electron microscopy. On-axis aberration coefficients, both spherical (Cs) and chromatic (Cc), are calculated for immersion lenses that are: purely magnetic, of the electric retarding field type, and that have mixed electric-magnetic fields. The aperture lens model is used to derive a general framework by which these lenses can be compared. Simulation results show that the mixed field electric-magnetic immersion lens is expected to provide the best image resolution. For a primary beam landing energy of 1 keV, and for field strength limits set by magnetic saturation and vacuum electrical field breakdown, the lowest on-axis aberration coefficients predicted for this lens lie between 50 μm to 60 μm.
Source Title: Optik (Jena)
ISSN: 00304026
Appears in Collections:Staff Publications

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