Please use this identifier to cite or link to this item: https://doi.org/10.1109/LED.2007.909836
DC FieldValue
dc.titleTensile-strained germanium CMOS integration on silicon
dc.contributor.authorZang, H.
dc.contributor.authorLoh, W.Y.
dc.contributor.authorYe, J.D.
dc.contributor.authorLo, G.Q.
dc.contributor.authorCho, B.J.
dc.date.accessioned2014-10-07T04:37:56Z
dc.date.available2014-10-07T04:37:56Z
dc.date.issued2007-12
dc.identifier.citationZang, H., Loh, W.Y., Ye, J.D., Lo, G.Q., Cho, B.J. (2007-12). Tensile-strained germanium CMOS integration on silicon. IEEE Electron Device Letters 28 (12) : 1117-1119. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2007.909836
dc.identifier.issn07413106
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83155
dc.description.abstractMonolithic integration of tensile-strained Si/Germanium (Ge)-channel n-MOS and tensile-strained Ge p-MOS with ultrathin (equivalent oxide thickness ∼14 ̊A) HfO2 gate dielectric and TaN gate stack on Si substrate is demonstrated. Defect-free Ge layer (279 nm) grown by ultrahigh vacuum chemical-vapor deposition is achieved using a two-step Ge-growth technique coupled with compliant Si/SiGe buffer layers. The epi-Ge layer experiences tensile strain of up to ∼ 0.67% and exhibits a peak hole mobility of 250 cm2/V · s which is 100% higher than the universal Si hole mobility. The gate leakage current is two orders of magnitude lower compared to the reported results on Ge bulk. © 2007 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LED.2007.909836
dc.sourceScopus
dc.subjectCMOS
dc.subjectCMOS integrated circuits
dc.subjectGermanium (Ge)
dc.subjectHfO2
dc.subjectHigh-κ
dc.subjectMOSFET
dc.subjectTensile strength
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/LED.2007.909836
dc.description.sourcetitleIEEE Electron Device Letters
dc.description.volume28
dc.description.issue12
dc.description.page1117-1119
dc.description.codenEDLED
dc.identifier.isiut000251429800014
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

11
checked on Aug 3, 2020

WEB OF SCIENCETM
Citations

8
checked on Aug 3, 2020

Page view(s)

88
checked on Aug 2, 2020

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.