Please use this identifier to cite or link to this item: https://doi.org/10.1109/JPHOTOV.2012.2202878
DC FieldValue
dc.titleStatic large-area hydrogenation of polycrystalline silicon thin-film solar cells on glass using a linear microwave plasma source
dc.contributor.authorHidayat, H.
dc.contributor.authorWidenborg, P.I.
dc.contributor.authorKumar, A.
dc.contributor.authorLaw, F.
dc.contributor.authorAberle, A.G.
dc.date.accessioned2014-10-07T04:36:53Z
dc.date.available2014-10-07T04:36:53Z
dc.date.issued2012
dc.identifier.citationHidayat, H., Widenborg, P.I., Kumar, A., Law, F., Aberle, A.G. (2012). Static large-area hydrogenation of polycrystalline silicon thin-film solar cells on glass using a linear microwave plasma source. IEEE Journal of Photovoltaics 2 (4) : 580-585. ScholarBank@NUS Repository. https://doi.org/10.1109/JPHOTOV.2012.2202878
dc.identifier.issn21563381
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83069
dc.description.abstractHydrogenation of polycrystalline silicon thin-film solar cells on glass is performed to improve the open-circuit voltage V oc of the devices. The hydrogenation process is performed using linear microwave plasma sources that are capable of generating a uniform hydrogen-argon plasma over a large area. The substrate is fixed (i.e., does not move) during the hydrogenation process. The optical emission intensities from the hydrogen-argon plasma are recorded at two wavelengths using an optical emission spectroscopy system and are used to study the impact of several process parameters. The impact of these process parameters on the device's V oc is also studied. We demonstrate that this plasma reactor is able to hydrogenate samples with a size of up to 400cm 2. The uniformity of the hydrogenation process is evaluated by measuring the 1-sun V oc with a suns-V oc tester, giving voltage variations of less than ±3%. The highest average V oc achieved in this study is 465mV on a 10 cm × 10 cm textured sample and 428mV on a 20 cm × 20 cm textured sample. In addition, secondary ion mass spectroscopy is used to measure the hydrogen concentration in the poly-Si films, giving an average concentration of about 6 × 10 19 cm -3. © 2012 IEEE.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/JPHOTOV.2012.2202878
dc.sourceScopus
dc.subjectHydrogenation
dc.subjectlarge-area processing
dc.subjectpolycrystalline silicon
dc.subjectthin-film solar cells
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentSOLAR ENERGY RESEARCH INST OF S'PORE
dc.description.doi10.1109/JPHOTOV.2012.2202878
dc.description.sourcetitleIEEE Journal of Photovoltaics
dc.description.volume2
dc.description.issue4
dc.description.page580-585
dc.identifier.isiut000318428400024
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

5
checked on May 16, 2022

WEB OF SCIENCETM
Citations

4
checked on May 16, 2022

Page view(s)

119
checked on May 12, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.