Please use this identifier to cite or link to this item: https://doi.org/10.1021/cm048609c
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dc.titleShape and size control of regularly arrayed nanodots fabricated using ultrathin alumina masks
dc.contributor.authorLei, Y.
dc.contributor.authorChim, W.-K.
dc.date.accessioned2014-10-07T04:36:10Z
dc.date.available2014-10-07T04:36:10Z
dc.date.issued2005-02-08
dc.identifier.citationLei, Y., Chim, W.-K. (2005-02-08). Shape and size control of regularly arrayed nanodots fabricated using ultrathin alumina masks. Chemistry of Materials 17 (3) : 580-585. ScholarBank@NUS Repository. https://doi.org/10.1021/cm048609c
dc.identifier.issn08974756
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/83010
dc.description.abstractWe report an approach to fabricate highly ordered semiconductor and metal nanoparticle arrays with controllable shapes and sizes, including nanometer-sized disks, hemispheres, hemiellipsoids, and conics. The nanoparticle arrays are fabricated on Si and Si/SiO2 substrates using ultrathin alumina masks (UTAMs) as evaporation masks. The shapes and the sizes of the nanoparticles are adjusted by changing the aspect ratio of the apertures of the UTAMs, and the amount of material deposited through the UTAMs. Highly ordered semiconductor nanoparticle arrays with particle sizes down to about 20 nm have also been fabricated.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1021/cm048609c
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentSINGAPORE-MIT ALLIANCE
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1021/cm048609c
dc.description.sourcetitleChemistry of Materials
dc.description.volume17
dc.description.issue3
dc.description.page580-585
dc.description.codenCMATE
dc.identifier.isiut000226804000017
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