Please use this identifier to cite or link to this item:
|Title:||Physical and electrical characterization of metal-insulator-metal capacitors with Sm2O3 and Sm2 O3/SiO2 laminated dielectrics for analog circuit applications||Authors:||Chen, J.-D.
|Issue Date:||2009||Citation:||Chen, J.-D., Yang, J.-J., Wise, R., Steinmann, P., Yu, M.-B., Zhu, C., Yeo, Y.-C. (2009). Physical and electrical characterization of metal-insulator-metal capacitors with Sm2O3 and Sm2 O3/SiO2 laminated dielectrics for analog circuit applications. IEEE Transactions on Electron Devices 56 (11) : 2683-2691. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2009.2030539||Abstract:||We report the first demonstration of metal-insulator-metal (MIM) capacitors with Sm2O3/SiO2 laminated dielectrics featuring low quadratic voltage coefficient of capacitance (VCC) and high capacitance density for precision analog circuit applications. In comparison with a HfO2 MIM dielectric, the Sm2O3 MIM dielectric is found to show a smaller quadratic VCC and a similar dielectric constant. We also investigated the cancellation of the positive quadratic VCC of Sm2 O3 through its combination with a SiO2 layer having a negative quadratic VCC. Thus, MIM capacitors with a Sm2O3/SiO2 laminated dielectric were fabricated with various Sm2O3 and SiO2 thickness combinations. Capacitors with the Sm2O3/ SiO2 laminated dielectric exhibit tunable quadratic VCC and high capacitance density. Very low quadratic VCC at various capacitance densities were achieved. The leakage current mechanism is related to Poole-Frenkel emission at a high positive bias. A smaller quadratic VCC is obtained at higher frequencies. We also conducted an extensive physical characterization of Sm2O3 using transmission electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy. © 2009 IEEE.||Source Title:||IEEE Transactions on Electron Devices||URI:||http://scholarbank.nus.edu.sg/handle/10635/82905||ISSN:||00189383||DOI:||10.1109/TED.2009.2030539|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 22, 2021
WEB OF SCIENCETM
checked on Feb 22, 2021
checked on Feb 15, 2021
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.