Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.jallcom.2006.02.111
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dc.titlePatterning of phase change films with microlens arrays
dc.contributor.authorLin, Y.
dc.contributor.authorHong, M.H.
dc.contributor.authorChen, G.X.
dc.contributor.authorLim, C.S.
dc.contributor.authorWang, Z.B.
dc.contributor.authorTan, L.S.
dc.contributor.authorShi, L.P.
dc.contributor.authorChong, T.C.
dc.date.accessioned2014-10-07T04:34:26Z
dc.date.available2014-10-07T04:34:26Z
dc.date.issued2008-01-31
dc.identifier.citationLin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Wang, Z.B., Tan, L.S., Shi, L.P., Chong, T.C. (2008-01-31). Patterning of phase change films with microlens arrays. Journal of Alloys and Compounds 449 (1-2) : 253-257. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jallcom.2006.02.111
dc.identifier.issn09258388
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82867
dc.description.abstractNanometer-sized features were fabricated on Ge1Sb2Te4 phase change films uniformly by irradiation with the fundamental and second harmonic components of a Nd:YAG laser through a microlens array. The effect of laser fluence and laser wavelength on the feature size was investigated. The change in the morphology and optical property of the phase change film was characterized. The smallest feature size of 355 nm was produced by using a low laser fluence and the 532 nm second harmonic of the laser. This was much smaller than the focus beam size of the microlens. The laser irradiation caused the formation of crystalline features on the amorphous phase change film. The amorphous region of the film could be removed by dipping in a NaOH solution, leaving the crystalline regions unaffected. © 2006 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.jallcom.2006.02.111
dc.sourceScopus
dc.subjectAtomic force microscopy
dc.subjectMicrolens array
dc.subjectNear-field scanning optical microscopy
dc.subjectPhase change
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.description.doi10.1016/j.jallcom.2006.02.111
dc.description.sourcetitleJournal of Alloys and Compounds
dc.description.volume449
dc.description.issue1-2
dc.description.page253-257
dc.description.codenJALCE
dc.identifier.isiut000252737500058
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