Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2007.08.016
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dc.titleNonlinear behavior of SOI free-free micromechanical beam resonator
dc.contributor.authorPalaniapan, M.
dc.contributor.authorKhine, L.
dc.date.accessioned2014-10-07T04:33:17Z
dc.date.available2014-10-07T04:33:17Z
dc.date.issued2008-03-10
dc.identifier.citationPalaniapan, M., Khine, L. (2008-03-10). Nonlinear behavior of SOI free-free micromechanical beam resonator. Sensors and Actuators, A: Physical 142 (1) : 203-210. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2007.08.016
dc.identifier.issn09244247
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/82769
dc.description.abstractMeasured nonlinear behavior of a capacitively driven free-free micromechanical beam resonator at different driving conditions is presented. The resonator, fabricated in SOIMUMPs process, has a measured resonant frequency of 654 kHz with an average quality factor, Q value of 12,000 operating at a pressure of 37.5 μTorr. The overall nonlinearity (including mechanical and electrical) in the resonator was found to be triggered after critical ac drive voltage amplitude of about 120 mVpp was exceeded. The observed nonlinearity was relatively independent of the proof-mass dc voltage, VP, as long as the critical ac drive voltage is not exceeded. Furthermore, partial compensation of spring hardening effect (arising from mechanical nonlinearity) with spring softening effect (from capacitive force used to actuate the resonator) is observed in this work. This feature is particularly useful for MEMS oscillator applications where frequency tuning can be done by varying VP without inducing nonlinearity in the resonator. © 2007 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.sna.2007.08.016
dc.sourceScopus
dc.subjectMEMS
dc.subjectMicromechanical
dc.subjectNonlinearity
dc.subjectOscillator
dc.subjectResonator
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1016/j.sna.2007.08.016
dc.description.sourcetitleSensors and Actuators, A: Physical
dc.description.volume142
dc.description.issue1
dc.description.page203-210
dc.description.codenSAAPE
dc.identifier.isiut000253613100031
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